MKS / Granville Phillips servo driven control valve 245Part Number: 245 Closed Leakage <0.000000001 sc/sec Materials Exposed to Gases 304 sst and fine silver Maximum Inlet Pressure 200 psig on center port, 25 psig on other port* Maximum Throughput 2500 Torr-liters/sec (200 slm) Pressure Control Range 0.00000000001 to 6000 Tor Presure Connection 6.35mm (1/4") OD tubulation Temperature Range Operating - 0°C to 50°CBakeout - 450°C (with driver removed and bake out clamp installed)
